Applications of SiC-Based Thin Films in Electronic and MEMS Devices
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چکیده
منابع مشابه
3C-SiC Films on Si for MEMS Applications: Mechanical Properties
Single crystal 3C-SiC films were grown on (100) and (111) Si substrate orientations in order to study the resulting mechanical properties of this material. In addition, poly-crystalline 3CSiC was also grown on (100)Si so that a comparison with monocrystaline 3C-SiC, also grown on (100)Si, could be made. The mechanical properties of single crystal and polycrystalline 3C-SiC films grown on Si sub...
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